Diffractive optical element

ABSTRACT

A diffractive optical element is provided that includes a first resin layer having steps on one surface, a second resin layer integrated with the first resin layer in tight contact, and a high refractive index layer disposed between a wall surface of the first resin layer and a wall surface of the second resin layer, wherein the high refractive index layer has a refractive index higher than those of the first resin layer and of the second resin layer, and the high refractive index layer is formed continuously to extend beyond the boundary between the wall surface and the inclined surface adjacent thereto, and to partly overlap the inclined surface.

BACKGROUND Field of the Disclosure

The present disclosure relates to a diffractive optical element for usein an optical apparatus, such as a still camera, a video camera, amicroscope, and an endoscope.

Description of the Related Art

A relief diffraction grating, which is a type of diffractive opticalelement, has a structure having a plurality of concentric steps (reliefpattern). Such structure includes a plurality of wall surfaces that formthese steps, and a plurality of inclined surfaces each bounded by thewall surfaces. The inclined surfaces are each an optically effectivesurface functioning as an optical element to focus incident light on adesired location. In contrast, the wall surfaces do not function as anoptical element. Light incident upon a wall surface is reflected andrefracted by the wall surface to a location different from the desiredfocus location, causing a phenomenon called flare on the image. Flaresignificantly reduces the image quality. Accordingly, various methodshave heretofore been suggested for reducing or eliminating such flare.

For example, International Publication No. 2011/99550 discloses aconfiguration for providing an improved diffraction efficiency byforming, on the wall surfaces, a waveguide layer formed of a materialhaving a refractive index higher than the refractive index of the resinlayer that forms the grating. Light incident upon a diffractive opticalelement having such configuration enters the waveguide withoutreflection or refraction on the wall surface, is then totally reflectedwithin the waveguide repeatedly to propagate in a direction parallel tothe wall surface, and is output from an end of the waveguide. Thus,flare can be reduced in principle.

International Publication No. 2011/99550 discloses a configurationcapable of reducing flare. However, application of this configuration toa gapless dual-layered diffraction grating presents the followingdisadvantages caused by using a waveguide layer.

A gapless dual-layered diffraction grating is configured such that afirst grating layer and a second grating layer are integrated with nogap therebetween, and having, therebetween, a grating interface on whicha relief pattern is formed. As such, if the waveguide layer describedabove is formed on the wall surface having such relief pattern, threedifferent materials, i.e., the first grating layer, the waveguide layer,and the second grating layer, are in contact with each other on the wallsurface. A transmission diffraction grating includes a first gratinglayer and a second grating layer formed of glass or optical resin. Inmany cases, at least one of the grating layers is formed of opticalresin. The waveguide layer is formed of an inorganic material because ofa need for a refractive index higher than the refractive indices of thefirst grating layer and of the second grating layer, and a need for alow and constant film thickness.

Thus, the use of the waveguide layer according to InternationalPublication No. 2011/99550 in a gapless dual-layered diffraction gratingresults in coexistence of an organic material and an inorganic materialon the wall surface. The point here is that the linear expansioncoefficient is significantly different between an organic material andan inorganic material. For example, an acrylic resin commonly used as anoptical material has a linear expansion coefficient of 5×10⁻⁵/° C.,while alumina, which is an inorganic material, has a linear expansioncoefficient of 7×10⁻⁶/° C., which is lower by a factor of almost 10.

A gapless dual-layered diffraction grating may generally be manufacturedin a process as follows: a first grating layer is formed using a replicatechnique or other method, a waveguide layer is then formed on the wallsurface, and finally, a second grating layer is formed in tight contactwith the first grating layer. The second grating layer is formed bycuring a resin keeping in tight contact with the first grating layer.Note that a typical resin is subject to change in the volume by about 5%to 10% between before and after the curing. Therefore, although specificdetails may vary depending on the viscoelasticity properties of bothmaterials, the curing process of the resin of the second grating layermay affect the first grating layer that has already been formed. Thismeans that the formation of the second grating layer may causedeformation of the first grating layer. In this case, due to the shapeof the wall surface that may easily induce a stress, the wall surfacemay undergo large deformation sufficiently to cause separation at theinterface between the grating layer and the waveguide layer, and thus togenerate an air layer between the grating layer and the waveguide layer.An air layer at the interface between the grating layer and thewaveguide layer changes the refractive index at the interface betweenthe grating layer and the waveguide layer from the design value. Thus,the light incident upon the waveguide layer is not totally reflected inthe waveguide layer, and may leak into the grating layer before reachingthe end portion of the waveguide layer, thereby preventing the lightfrom being output through the end portion of the waveguide layer asdesigned. Accordingly, the flare reduction effect may not be provided.

In addition, separation at the interface between the grating layer andthe waveguide layer may also be triggered by environmental factors suchas a high temperature, a low temperature and a high temperature/highhumidity. Thus, even if the optical performance is sufficiently highsome time after production, the optical performance may degrade overtime.

SUMMARY OF THE DISCLOSURE

It is one aspect of the present disclosure to provide a gaplessdual-layered diffractive optical element including a waveguide layer ona wall surface, and capable of reducing or eliminating separation at theinterface between the waveguide layer and the grating layer to reduceoccurrence of flare for a prolonged period of time after production.

In a first aspect of the present disclosure, a diffractive opticalelement is provided that includes a first resin layer having a firstsurface, the first surface having a plurality of steps, wherein theplurality of steps include a plurality of wall surfaces and a pluralityof inclined surfaces each bounded by the wall surfaces, a second resinlayer disposed on a side closer to the first surface of the first resinlayer, wherein a surface, of the second resin layer, on a side closer tothe first resin layer has a plurality of steps respectivelycorresponding to the steps of the first resin layer, and

a high refractive index layer disposed between the wall surfaces of thefirst resin layer and a corresponding one of the wall surfaces of thesecond resin layer, wherein the high refractive index layer has arefractive index higher than refractive indices of the first resin layerand of the second resin layer,

wherein the high refractive index layer is formed to extend beyond thewall surfaces, and to overlap portions of adjacent ones of the inclinedsurfaces.

In a second aspect of the present disclosure, an optical apparatus isprovided that includes the diffractive optical element according to thefirst aspect of the present disclosure.

Further features of the present disclosure will become apparent from thefollowing description of exemplary embodiments (with reference to theattached drawings).

BRIEF DESCRIPTION OF THE DRAWINGS

FIGS. 1A to 1C are views schematically illustrating the configuration ofa diffractive optical element according to one embodiment of the presentdisclosure. FIG. 1A is a cross-sectional view along the thicknessdirection illustrating the overall configuration of the diffractiveoptical element. FIG. 1B is a partial enlarged cross-sectional viewalong the thickness direction of the diffractive optical element of FIG.1A. FIG. 1C is a top view of the diffractive optical element of FIG. 1A,viewed from the light incident side.

FIG. 2 is an enlarged view of a portion including a wall surface of thediffractive optical element of FIGS. 1A to 1C.

FIGS. 3A to 3C are process diagrams illustrating a method formanufacturing the diffractive optical element of FIGS. 1A to 1C.

FIGS. 4A to 4C are process diagrams illustrating the method formanufacturing the diffractive optical element of FIGS. 1A to 1C.

FIGS. 5A and 5B are process diagrams illustrating the method formanufacturing the diffractive optical element of FIGS. 1A to 1C.

FIG. 6 is a schematic view illustrating an optical apparatus accordingto one embodiment of the present disclosure.

DESCRIPTION OF THE EMBODIMENTS

An exemplary embodiment of the present disclosure will be described indetail below with reference to drawings. It is understood that thepresent disclosure is not limited to the specific embodiment disclosed.Note that elements or features other than those specifically describedin the description below or other than those specifically illustrated inthe drawings may be implemented using any known technique in the art.

FIGS. 1A to 1C schematically illustrate the configuration of adiffractive optical element according to one embodiment of presentdisclosure. FIG. 1A is a cross-sectional view along the thicknessdirection illustrating the overall configuration of the diffractiveoptical element. FIG. 1B is a partial enlarged cross-sectional view ofthe diffractive optical element of FIG. 1A. FIG. 1C is a top view of thediffractive optical element of FIG. 1A, viewed from the light incidentside. FIGS. 1A and 1B each illustrate a cross section of the diffractiveoptical element, taken along line A-A of FIG. 1C. Line A-A passesthrough the optical axis, which is at the center of the diffractiveoptical element. In other words, a cross section along the thicknessdirection refers to a cross section of the diffractive optical element,taken along a line passing through the center viewed from above thediffractive optical element. As illustrated in FIG. 1A, the diffractiveoptical element according to the embodiment of the present disclosure isa gapless dual-layered diffractive optical element including a firstresin layer 2 and a second resin layer 3. The first resin layer (blazeddiffraction grating) 2 has, on one surface (first surface) of the firstresin layer 2, a plurality of steps having a saw-toothed cross-sectionalong the thickness direction, and each having a concentric shape viewedfrom the light incident side. The first surface of the first resin layer2 includes a plurality of wall surfaces 2 b that form the stepsdescribed above, and a plurality of inclined surfaces 2 a each boundedby the wall surfaces 2 b. In other words, the wall surfaces 2 b and theinclined surfaces 2 a together form a relief pattern. The second resinlayer 3 has, on the surface closer to the first resin layer 2, aplurality of steps respectively corresponding to the steps of the firstresin layer 2 so that the second resin layer 3 will be disposed in tightcontact with the first resin layer 2. The surface closer to the firstresin layer 2 of the second resin layer 3 includes a plurality of wallsurfaces 3 b that form the steps of the second resin layer 3, and aplurality of inclined surfaces 3 a each bounded by the wall surfaces 3b. A high refractive index layer 5 is disposed between the wall surfaces2 b of the first resin layer 2 and a corresponding one of the wallsurfaces 3 b of the second resin layer 3. Note that, to simplify thedescription, the term “wall surface” may be used herein in the singularform especially in a context of a high refractive index layer; however,such description also applies to other wall surfaces of the diffractiveoptical element.

This embodiment assumes that the high refractive index layer 5 is formedon the first resin layer 2, and a resin is then filled and cured so asto be held in tight contact with the first resin layer 2 and with thehigh refractive index layer 5 to form the second resin layer 3. Notethat the terms “first” and “second” as used herein do not denote anyorder, quantity, or importance, but rather are used to distinguish oneelement from another.

The diffractive optical element of FIG. 1A includes a first basematerial 1 on a side opposite the first surface across the first resinlayer 2, and a second base material 4 on a side opposite the first resinlayer 2 across the second resin layer 3. These base materials 1 and 4may each be formed of either a glass material or an optical resinmaterial that provides desired optical characteristics, includingtransparency. However, a glass material is more suitable in view of lowprobability of variation in characteristics (i.e., high reliability).Examples of such glass material include “S-LAH55” (manufactured byOhara. Inc.), which is a lanthanum-based, high refractive index, lowdispersion glass, and “S-FPL51” (manufactured by Ohara Inc.), which isan ultra-low dispersion glass. Note that the second base material 4 maybe or not be included because presence and absence of the second basematerial 4 differ only slightly in optical performance provided in termsof a diffraction grating.

The first resin layer 2 and the second resin layer 3 are each adiffraction grating. The resin materials for forming the first and thesecond resin layers 2 and 3 are not particularly limited as long as suchmaterials are optical resin materials capable of providing satisfactoryoptical characteristics and reliability. However, from a viewpoint ofproducibility, a photosensitive resin material is preferred. Examples ofsuitable resin material include an acrylate-based resin and apolycarbonate resin. To achieve optical performance required, inorganicfine particles may be added to the optical resin material depending onthe situation. The inorganic fine particles to be added are selectedbased on the optical characteristics required. Examples of the materialof such inorganic fine particles include zirconia oxide, titanium oxide,zinc oxide, indium oxide, tin oxide, antimony oxide, indium tin oxide(ITO), antimony-doped tin oxide (ATO), and zinc-doped indium oxide(IZO).

FIG. 1B is a partial enlarged view of FIG. 1A. As illustrated in FIG.1B, in the embodiment of the present disclosure, the high refractiveindex layer 5 disposed between the wall surface 2 b of the first resinlayer 2 and the waif surface 3 b of the second resin layer 3 is formedto partly overlap the inclined surfaces 2 a and 3 a. More specifically,paying attention to the first resin layer 2, the high refractive indexlayer 5 formed on the wall surface 2 b is formed continuously to extendbeyond the boundary between the wall surface 2 b and the inclinedsurface 2 a, and to partly overlap the inclined surface 2 a. In theembodiment of the present disclosure, forming of the high refractiveindex layer 5 not only on the wall surface 2 b but also on the inclinedsurface 2 a prevents separation at the interfaces between the highrefractive index layer 5 and the first resin layer 2 and between thehigh refractive index layer 5 and the second resin layer 3.

However, the extension of the high refractive index layer 5 to partlyoverlap the inclined surface 2 a reduces the effective area of theinclined surface 2 a, and accordingly degrades optical characteristicsas compared to those required of the diffractive optical element. Thus,it is preferable that the proportion of the area of the high refractiveindex layer 5 overlapping the inclined surface 2 a to the area of theinclined surface 2 a be determined so that the initial opticalcharacteristics will not be significantly degraded while opticalcharacteristic degradation due to the separation can be reduced oreliminated. Further details will be described below.

The top of the wall surface 2 b as illustrated in FIG. 1B is hereinreferred to as “grating ridge 2 c” of the first resin layer 2, and thebottom of the wall surface 2 b as illustrated in FIG. 1B is hereinreferred to as “grating trough 2 d” of the first resin layer 2. Thegrating ridge 2 c and the grating trough 2 d are each a boundary betweenthe inclined surface 2 a and the wall surface 2 b. The length L2represents the length of the portion of the high refractive index layer5 overlapping the inclined surface 2 a adjacent to the grating ridge 2 cin the cross-section along the thickness direction of the diffractiveoptical element. The length L3 represents the length of the portion ofthe high refractive index layer 5 overlapping the inclined surface 2 aadjacent to the grating trough 2 d minus the thickness L4. Although thedescription below will specifically outline the length of the portion ofthe high refractive index layer 5 overlapping the inclined surface 2 aof the first resin layer 2, a similar explanation also applies to thesecond resin layer 3.

As described above, the lengths L2 and L3 of the portions of the highrefractive index layer 5 overlapping the inclined surface 2 a areadjusted to a value that can achieve both optical performance requiredof a diffractive optical element, and a reduction of separation. Themost important characteristic in the optical performance required adiffractive optical element is diffraction efficiency. A diffractionefficiency is the ratio of the intensity of diffracted light of thedesigned diffraction order output to a desired location to the intensityof the incident light. The diffractive optical element according to theembodiment is designed so that the light incident upon the inclinedsurface 2 a will entirely act as effective light. Although specificdetails may vary depend on the specific design, it is generally assumedthat only two materials forming the grating interface exist on theinclined surface 2 a. A foreign material may reduce the diffractionefficiency. A material having a refractive index higher than therefractive index of the material that constitutes the grating interfacepresent on the inclined surface 2 a causes, as a refractive opticalsystem, the light to propagate at a refraction angle different from thedesign angle, thereby eventually preventing the light from beingcollected at a desired location, and also causes, as a diffractiveoptical system, a diffraction phenomenon between materials havingrefractive indices different from the design value, thereby preventing adesired diffraction order from being provided. In both cases, aphenomenon not intended in the design occurs, thereby reducing thediffraction efficiency and the image quality. Thus, it is preferablethat the proportion of the area of the high refractive index layer 5overlapping the inclined surface 2 a be as low as practically possiblefrom the viewpoint of optical performance.

A diffractive optical element having a relief pattern is generallyconfigured such that the grating pitch gradually decreases in adirection away from the optical axis toward the outer circumference toprovide a lens action (light converging diverging action). If there areelements that invalidate the inclined surface 2 a arranged at regularintervals, the effect of such elements is inversely proportional to thelength of the inclined surface 2 a. Specifically, an inclined surface 2a having a greater length (i.e., a larger grating pitch) is lessaffected, while, on the contrary, an inclined surface 2 a having asmaller length (i.e., a smaller grating pitch) is more affected.

In a diffractive optical element having a typical relief pattern, thehigh refractive index layer 5 described above has a smaller effect ofreducing image quality on such diffractive optical element at a locationcloser to the optical axis, and, on the contrary, has a larger effect ofreducing image quality on the diffractive optical element at a locationcloser to the outer circumference. Accordingly, the length of theportion of the high refractive index layer 5 overlapping the inclinedsurface 2 a is ideally changed in proportion to the grating pitch.Specifically, the interval between adjacent high refractive index layers5 formed on the inclined surface 2 a is ideally reduced in the directionaway from the optical axis toward the outer circumference.

However, although specific details may vary depending on the method offorming the high refractive index layer 5 on the wall surface 2 b, agenerally conceived method is likely to produce a generally constantinterval between adjacent high refractive index layers 5 formed on theinclined surface 2 a. In such case, the length L2 and the length L3illustrated in FIG. 1B are respectively preferably 0.1 μm or more andpreferably 0.2 μm or more.

The sum of the lengths L2 and the lengths L3 preferably account for 5%or less of the sum of the lengths L1 of the inclined surfaces 2 a in theentire diffractive optical element. This proportion means that thereduction in the effect of the inclined surface 2 a by the highrefractive index layer 5 is maintained at 5% or less, or that adiffraction efficiency of 95% or higher with respect to the design valueis secured. The above proportion exceeding 5% results in a reduceddiffraction efficiency, and hence a reduced effect of chromaticaberration correction as compared to that generally expected for adiffraction grating. Such condition results in a generally-blurredcaptured image, and also reduces the flare reduction effect.

On the other hand, to reduce or eliminate separation at the interfacebetween the first resin layer 2 or the second resin layer 3 and the highrefractive index layer 5, it is preferable that the lengths L2 and L3 ofthe portions of the high refractive index layer 5 overlapping theinclined surface 2 a be long. Such separation is caused by, for example,expansion and/or shrinkage of the first resin layer 2 and the secondresin layer 3 due to a change in environmental condition such astemperature and/or humidity, or deformation of the first resin layer 2due to cure shrinkage of the resin during the formation of the secondresin layer 3. Thus, to reduce or eliminate the separation, reduction inthe degree of expansion and shrinkage of the first resin layer 2 and thesecond resin layer 3 is important. According to the present disclosure,covering, by the high refractive index layer 5, the grating ridge 2 cand the grating trough 2 d of the first resin layer 2 reduces suchexpansion and/or shrinkage. As a result, separation at the interfacesbetween the first and second resin layers 2 and 3 and the highrefractive index layer 5 can be reduced or eliminated.

FIG. 2 is an enlarged view of a portion including the wall surfaces 2 band 3 b of FIG. 1B. The angle α illustrated in FIG. 2 is an angle formedat the grating ridge 2 c of the first resin layer 2 in the cross-sectionalong the thickness direction. The angle β illustrated in FIG. 2 is anangle formed at the grating trough 2 d of the first resin layer 2. Theheight h1 is the distance from the grating ridge 2 c of the first resinlayer 2 to the second base material 4 (i.e., the thickness of the secondresin layer 3 at the grating ridge 2 c). The height h2 is the distancefrom the grating trough 2 d of the first resin layer 2 to the secondbase material 4 (i.e., the thickness of the second resin layer 3 at thegrating trough 2 d). Note that the high refractive index layer 5 is notshown in FIG. 2 for simplicity.

As described in the embodiment, a diffraction grating that includesinclined surfaces 2 a for focusing the incident light onto a desiredlocation by means of a relief pattern, and wall surfaces 2 b that do nothave a function as an optical element typically has the angles α and βin ranges of (0<) α≤120° and (210<) β≤270°. In a diffraction gratinghaving such configuration, shrinkage in a wide angle at the gratingtrough 2 d concentrates on one point, and thus tends to generate astress higher than the stress at the grating ridge 2 c. The relationshipof h1<h2 further causes a higher degree of cure shrinkage of the resinmaterial at the grating trough 2 d than at the grating ridge 2 c duringformation of the second resin layer 3. In other words, the gratingtrough 2 d tends to undergo a higher stress than the grating ridge 2 c,and accordingly, separation is more likely to occur at the interfacebetween the first resin layer 2 and the high refractive index layer 5.Thus, the high refractive index layer formed continuously to partlyoverlap the adjacent inclined surface 2 a preferably has a greaterlength at the grating trough 2 d than at the grating ridge 2 c.Specifically, it has been found that the lengths L2 and L3 respectivelysatisfying L2≥0.1 μm and L3≥0.2 μm can effectively reduce or eliminatean interlayer separation.

Although specific details may vary depending on the materials that formthe first and second resin layers 2 and 3, important aspects of thematerial of the high refractive index layer 5 are to have a refractiveindex higher than, and a linear expansion coefficient lower than, thoseof these resin materials. Although specific details may vary dependingon the refractive index of the high refractive index layer 5, the highrefractive index layer 5 is a thin film having a film thickness ofseveral hundreds of nanometers at the maximum, and an erroneousdifference from the design in the shape is as low as several tens ofnanometers. In addition, although specific details may vary depending onthe design, considering the tolerance of the refractive index ofmaterial of about 0.05 or less, a vacuum film formation technique islikely to be used to form the high refractive index layer 5. However,formation of a film on a curved surface such as that of a lens maygenerate a significant variation in the refractive index depending onthe angle of incidence, thereby possibly preventing the desired effectfrom being provided. The dependence of the refractive index on the filmformation angle is partly specific to the material, but also depends onthe intended refractive index. A portion of a film formed by normalincidence will have a density and a refractive index as expected forthat material, but with a decrease in the angle of incidence, thedensity decreases, and the refractive index also decreases accordingly.Since a material formed to have a higher refractive index in a portionunder normal incidence undergoes a more significant change in therefractive index with a decrease in the angle of incidence, therefractive index of the portion under normal incidence is desirably nothigh in view of stable production. To provide a function as a waveguideat a location between diffraction gratings formed of resin, and provideproduction stability also, an inorganic material having a refractiveindex in a range from about 1.6 to about 2.1 under normal incidence issuitably used. Examples of such inorganic material include glassmaterial components such as Al₂O₃, HfO₂, ZrO₂, and La₂O₃, and mixturesthereof.

A method for manufacturing the diffractive optical element illustratedby way of example in FIG. 1 will be described below using an examplewith reference to FIGS. 3A to 5B. It should be understood that themethod for manufacturing the diffractive optical element according tothe embodiment of the present disclosure is not limited to themanufacturing method described below as long as satisfactory performancecan be provided.

The first resin layer 2 is formed on the first base material 1 using areplica technique. Specifically, a first resin material 11 is dropped onthe base material 1 as illustrated in FIG. 3A. Then, this base material1 is placed over a mold 12 having a desired shape to allow the resinmaterial 11 to fill the gap between the base material 1 and the mold 12as illustrated in FIG. 3B. Next, the first resin material 11 is curedusing an ultraviolet (UV) radiation from a UV light source 13 throughthe base material 1 as illustrated in FIG. 3C to form the first resinlayer 2 having the desired shape on the base material 1. The first resinlayer 2 integrated with the base material 1 is released from the mold 12as illustrated in FIG. 4A, and is then heated in an oven to allow theresin to completely cure.

Next, the high refractive index layer 5 is formed on the wall surface 2b of the first resin layer 2 as follows. A negative photoresist for alift-off process is applied on the entire external surface of the firstresin layer 2. A UV radiation is then irradiated in the directionparallel to the wall surface 2 b (i.e., along the optical axis of thelens), after which the photoresist is developed in sodium carbonatesolution. Due to a relatively large film thickness on the wall surface 2b in the direction parallel to the wall surface 2 b, the exposure levelis inadequate in the portion along the wall surface 2 b. The exposurelevel is also inadequate in the portion at the grating trough 2 d due tothe influence of the wall surface 2 b. Thus, the photoresist isdeveloped in both of these portions. Despite an adequate exposure levelat the grating ridge 2 c, a high replacement efficiency with respect tothe developing solution due to the shape results in a higher etchingrate than in other locations. Thus, by optimization of the amount ofirradiation of UV radiation and the duration of the developing, thefilm-remaining ratio of a photoresist 14 is adjusted to allow thephotoresist to be developed and removed along the wall surface 2 b, atthe grating ridge 2 c, and at the grating trough 2 d as illustrated inFIG. 4B. The resultant product including the first resin layer 2patterned is placed in a vapor deposition apparatus to deposit a highrefractive index layer material 15 in the direction normal to the wallsurface 2 b as illustrated in FIG. 4C. Then, the photoresist 14 isremoved in a strong alkaline solution. Thus, the high refractive indexlayer 5 is obtained that is formed continuously to extend beyond thewall surface 2 b, and to partly overlap the adjacent inclined surfaces 2a of the first resin layer 2 as illustrated in FIG. 5A.

Finally, a second resin material 16 is filled into the gap between thefirst resin layer 2 and the second base material 4 described above, anda UV radiation is irradiated through the second base material 4 from theUV light source 13 as illustrated in FIG. 5B to cure the resin material16 to obtain the second resin layer 3. Thus, the gapless dual-layereddiffractive optical element is obtained.

The diffractive optical element according to the present disclosure isapplicable to various optical apparatuses. Examples thereof include astill camera for capturing a still image, a video camera for capturing amoving image, a microscope, and an endoscope.

FIG. 6 is a cross-sectional view of an optical system in a lens barrelof an interchangeable lens used in a single lens reflex camera. Thissingle lens reflex camera is one example of an optical apparatusaccording to one preferred embodiment of the present disclosure. Thesingle lens reflex camera includes a lens barrel 30. The lens barrel 30includes a casing 29 and an optical system disposed in the casing 29.The optical system includes lenses 21 to 28 and a diffractive opticalelement 20 arranged normal to an optical axis O. In FIG. 6, light entersfrom the lens 21 side, and the lens mount for attachment to, anddetachment from, the camera body is disposed on the lens 28 side.Disposing the diffractive optical element 20 according to the presentdisclosure at an appropriate position in the optical system enables asmall and lightweight lens barrel having reduced chromatic aberration tobe provided. In addition, disposing the diffractive optical element 20behind the lens 21 as illustrated in FIG. 6 prevents external light fromdirectly entering the diffractive optical element 20, thereby allowingoccurrence of flare to be reduced or eliminated.

EXAMPLES Example 1 and Comparative Example 1

The gapless dual-layered diffractive optical element illustrated by wayof example in FIG. 1 was produced using the process illustrated in FIGS.3A to 5B. The first base material 1 having a convex shape and the secondbase material 4 having a concave shape were each a lens of an opticalglass containing boron and silicon (“S-BSL7” manufactured by Ohara.Inc.). The first and the second base materials 1 and 4 respectively hada diameter of 58 mm and a diameter of 61 mm.

The diffractive optical element included the first resin layer 2 and thesecond resin layer 3 in order from the first base material 1, betweenthe first base material 1 and the second base material 4. The firstresin layer 2 was formed from a UV-curable resin formed by dispersingfine particles of indium oxide tin in a UV-curable acrylic resin mainlycontaining urethane-modified polyester acrylate having an unsaturatedfunctional group, and dicyclopentenyloxyethyl methacrylate. The secondresin layer 3 was formed from a material formed by dispersing fineparticles of zirconia oxide in a UV-curable acrylic resin mainlycontaining urethane-modified polyester acrylate having an unsaturatedfunctional group, and dicyclopentenyloxyethyl methacrylate. Therefractive indices at d-line of the first resin layer 2 and of thesecond resin layer 3 were respectively 1.57 and 1.62. The first resinlayer 2 had a grating height of 10 μm, and had spacings between adjacentgratings gradually decreasing from 3.0 mm to 0.1 mm in a direction awayfrom the optical axis toward the outer circumference. The total numberof the wall surfaces 2 b was 80.

The high refractive index layer 5 of Example 1 was formed of an oxidemixture of Al₂O₃ and ZrO₂, and had a refractive index at d-line of 1.70and a thickness of 170 nm. The lengths of the portions of the highrefractive index layer 5 overlapping the inclined surface 2 a wererespectively L2=0.25 μm on the surface adjacent to the grating ridge 2 cof the first resin layer 2, and L3=0.35 μm on the surface adjacent tothe grating trough 2 d. The sum of the lengths L2 and the lengths L3 inthis configuration accounted for 0.28% of the sum of the lengths L1 ofthe inclined surfaces 2 a.

The diffractive optical element of Example 1 was incorporated into animaging optical system (EF lens barrel manufactured by Canon Inc.) thathas been modified for determining the degree of flare, and the degree offlare caused by the wall surface was determined. The determination ofthe degree of flare caused by the wall surface was performed as follows.Only the grating part of the tenth annular zone from the optical axiswas irradiated with laser beams of red (635 nm), green (532 nm), andblue (473 nm). The diffracted light generated was captured by a chargecoupled device (CCD) sensor, and the ratio of unwanted diffracted lightintensity to the incident light intensity was calculated as the degreeof flare. The laser beams were generated using a laser “JUNO-Compact”manufactured by Showa Optronics Co., Ltd. Since the diffractive opticalelement of Example 1 was designed to use positive first (+1st)diffracted light, diffracted light of the other orders was the unwantedlight that was not considered in the design. Thus, the intensity ofunwanted diffracted light that was present at locations corresponding0th, +2nd, negative first (−1st), and +3rd light, which would be imagedin effective pixels, was determined. Specifically, a slit that allowsonly 0th, +2nd, −1st, and +3rd light to pass through is placed in frontof the CCD sensor to allow only the desired diffracted light to enterthe CCD sensor. To ensure the accuracy of determination, the measurementwas performed at a temperature of 23±0.5° C. and a relative humidity of50±10%. In addition, to eliminate the effect of external light, theexperimental setup was light-shielded using a light-shielding film. Thedetermination result indicated that the degree of flare caused by thewall surface of the diffractive optical element of Example 1 was 0.002%.

The diffraction efficiency of the diffractive optical element was alsodetermined. Specifically, light is emitted, along the optical axis, to aregion having a grating spacing of 100 μm in the diffractive opticalelement, and a slit is placed on the diffracted light output side toallow only the diffracted light of the intended order to pass throughthe slit. The intensity of the diffracted light was determined by aspectrophotometer, and the ratio of the intensity of the diffractedlight to the intensity of the incident light was calculated as thediffraction efficiency. The spectrophotometer used was spectrophotometer“U-4000” manufactured by Hitachi High-Technologies Corporation. Themeasurement result indicated that the diffraction efficiency in Example1 was 98.7% or higher.

As Comparative Example 1, a diffractive optical element identical tothat of Example 1 was prepared except that the high refractive indexlayer 5 was not formed on the wall surface. The determination results ofthe degree of flare and of the diffraction efficiency indicated that thedegree of flare caused by the wall surface was 0.018%, and thediffraction efficiency was 99.0% or higher.

Thus, in Example 1, formation of the high refractive index layer 5enabled the degree of flare caused by the wall surface to be reduced to1/9 while the decrease in the diffraction efficiency was maintained at alow level.

A thermal shock test (30 cycles, each cycle having a 20-minute period at−40° C. and a 20-minute period at 40° C.) was performed on thediffractive optical element of Example 1 as a durability test, and thedegree of flare and the diffraction efficiency were determined in asimilar manner to that described above. The results indicated that thedegree of flare caused by the wall surface was 0.002%, and thediffraction efficiency was 98.8% or higher. Thus, no change was observedin these optical characteristics between before and after the durabilitytest. No particular change was either observed in the externalappearance.

The geometry of the diffractive optical element was determined in thecourse of formation thereof using an interferometer (three-dimensionaloptical profiler “New-View” manufactured by Zygo Corporation). Thegeometry of the high refractive index layer 5 was determined by cuttingthe diffractive optical element after completion of the durability test,and observing the cross section using a scanning electron microscope(SEM).

Example 2 and Comparative Example 2

The first resin layer 2 and the second resin layer 3 were formed, and agapless dual-layered diffractive optical element was produced, similarlyto Example 1 except that the first and the second base materials 1 and 4respectively had a diameter of 34 mm and a diameter of 38 mm. Therefractive indices at d-line of the first resin layer 2 and of thesecond resin layer 3 were respectively 1.57 and 1.62. The first resinlayer 2 had a grating height of 10 μm, and had spacings between adjacentgratings gradually decreasing from 3.9 mm to 0.2 mm in a direction awayfrom the optical axis toward the outer circumference. The total numberof the wall surfaces 2 b was 65.

The high refractive index layer 5 of Example 2 was formed of an oxidemixture of Al₂O₃ and La₂O₃, and had a refractive index at d-line of 1.68and a thickness of 140 nm. The lengths of the portions of the highrefractive index layer 5 overlapping the inclined surface 2 a wererespectively L2=6.5 μm on the surface adjacent to the grating ridge 2 cof the first resin layer 2, and L3=9.0 μm on the surface adjacent to thegrating trough 2 d. The sum of the lengths L2 and L3 in thisconfiguration accounted for 4.97% of the sum of the lengths L1 of theinclined surfaces 2 a.

Similarly to Example 1, the diffractive optical element of Example 2 wasincorporated into an imaging optical system, and the degree of flarecaused by the wall surface and the diffraction efficiency weredetermined. The determination results indicated that the diffractiveoptical element of Example 2 exhibited the degree of flare caused by thewall surface of 0.003%, and the diffraction efficiency of 95.0% orhigher.

As Comparative Example 2, a diffractive optical element identical tothat described above was prepared except that the high refractive indexlayer 5 was not formed on the wall surface 2 b. The determination of thedegree of flare and the diffraction efficiency similar to that describedabove indicated that the degree of flare caused by the wall surface was0.030%, and the diffraction efficiency was 99.0% or higher.

Thus, the diffractive optical element of Example 2 reduced the degree offlare caused by the wall surface to 1/10 by the formation of the highrefractive index layer 5 while the decrease in the diffractionefficiency was maintained within 5 percentage points.

A thermal shock test similar to that of Example 1 was performed on thediffractive optical element of Example 2, and the degree of flare andthe diffraction efficiency were determined in a similar manner to thatdescribed above. The results indicated that the degree of flare causedby the wall surface was 0.003%, and the diffraction efficiency was 95.0%or higher. Thus, no change was observed in these optical characteristicsbetween before and after the durability test. No particular change waseither observed in the external appearance.

Example 3

A gapless dual-layered diffractive optical element was producedsimilarly to Example 2 except that the lengths of the portions of thehigh refractive index layer 5 overlapping the inclined surface 2 a wererespectively L2=10 μm and L3=15 μm. In the diffractive optical elementof Example 3, the sum of the lengths L2 and L3 accounted for 8.02% ofthe sum of the lengths L1 of the inclined surfaces 2 a.

Similarly to Example 1, the diffractive optical element of Example 3 wasincorporated into an imaging optical system, and the degree of flarecaused by the wall surface and the diffraction efficiency weredetermined. The determination results indicated that the diffractiveoptical element of Example 3 exhibited the degree of flare caused by thewall surface of 0.003%, and the diffraction efficiency of 91.8% orhigher.

As compared to Comparative Example 2 (degree of flares 0.030%,diffraction efficiency: 99.0%), the diffractive optical element ofExample 3 reduced the degree of flare caused by the wall surface to 1/10by the formation of the high refractive index layer 5. However, thediffraction efficiency was decreased by about 8 percentage pointspartially due to film formation on a portion of the inclined surface.Note that, as compared to a lens without a diffractive optical element,the chromatic aberration was improved, and it was thus confirmed thatthe diffractive optical element exhibited sufficient performance as adiffractive optical element.

A thermal shock test similar to that of Example 1 was performed on thediffractive optical element of Example 3, and the degree of flare andthe diffraction efficiency were determined in a similar manner to thatdescribed above. The results indicated that the degree of flare causedby the wall surface was 0.003%, and the diffraction efficiency was 91.8%or higher. Thus, no change was observed in these optical characteristicsbetween before and after the durability test. No particular change waseither observed in the external appearance.

Comparative Example 3

A gapless dual-layered diffractive optical element was producedsimilarly to Example 1 except that the high refractive index layer 5 wasformed only an the wall surface, and thus not to overlap the inclinedsurfaces (i.e., L2=L3=0).

Similarly to Example 1, the diffractive optical element of ComparativeExample 3 was incorporated into an imaging optical system, and thedegree of flare caused by the wall surface and the diffractionefficiency were determined. The determination results indicated that thediffractive optical element of Comparative Example 3 exhibited thedegree of flare caused by the wall surface of 0.002% and the diffractionefficiency of 99.0% or higher.

As compared to Comparative Example 1 (degree of flare: 0.018%,diffraction efficiency: 99.0%), the diffractive optical element ofComparative Example 3 reduced the degree of flare caused by the wallsurface to 1/9 by the formation of the high refractive index layer 5while the decrease in the diffraction efficiency was maintained at a lowlevel.

A thermal shock test similar to that of Example 1 was performed on thediffractive optical element of Comparative Example 3, and the degree offlare and the diffraction efficiency were determined in a similar mannerto that described above. The results indicated that the diffractionefficiency was 98.9% or higher, indicating that no change was observedbetween before and after the durability test. In contrast, the degree offlare caused by the wall surface was 0.010%, indicating that the flarereduction effect was reduced to ½. In addition, the diffractive opticalelement was irradiated with light emitted from a light emitting diode(LED) light source for external appearance investigation to investigatethe external appearance. This investigation showed that a bright lineappeared along an annular zone of the grating, which had not beenobserved before the durability test.

The diffractive optical element whose optical performance and externalappearance had been changed by the durability test was cut to observethe cross section using an SEM. As a result, a separation was observedat a wall surface between toe first resin layer 2 or the second resinlayer 3 and the high refractive index layer 5. Table 1 below summarizesthe results of Examples 1 to 3 and of Comparative Examples 1 to 3.

TABLE 1 Example Comparative Example Comparative Example Comparative 1Example 1 2 Example 2 3 Example 3 High L2 (μm) 0.3 — 6.5 — 10.0 0.0Refractive L3 (μm) 0.4 — 9.0 — 15.0 0.0 Index Layer Proportion 0.28 —4.97 — 8.02 — of Sum of L2 and L3 to Sum of L1 (%) Flare Ratio Before0.002 0.018 0.003 0.030 0.003 0.002 Durability Test (%) After 0.002 —0.003 — 0.003 0.010 Durability Test (%) Diffraction Before 98.7 99.095.0 99.0 91.8 99.0 Efficiency Durability Test (%) After 98.8 — 95.0 —91.8 98.9 Durability Test (%) External Appearance No — No — NoSeparation After Durability Test Change Change Change Occurred

The present disclosure can reduce the degree of flare caused by a wallsurface by means of waveguide effect by formation of a high refractiveindex layer on the wall surfaces. The present disclosure can also reduceor eliminate separation at interfaces between the high refractive indexlayer and the first resin layer and the second resin layer since thehigh refractive index layer is formed to extend beyond the boundarybetween the inclined surface and the wall surface, and to partly overlapthe inclined surface. Thus, the present disclosure can provide a gaplessdual-layered diffractive optical element capable of reducing occurrenceof flare for a prolonged period of time after production, and thus anoptical apparatus capable of providing high optical performance for aprolonged period of time by using such diffractive optical element.

While the present disclosure has been described with reference toexemplary embodiments, it is to be understood that the disclosure is notlimited to the disclosed exemplary embodiments. The scope of thefollowing claims is to be accorded the broadest interpretation so as toencompass all such modifications and equivalent structures andfunctions.

This application claims the benefit of Japanese Patent Application Nos.2017-028820, filed Feb. 20, 2017, and 2018-010318, filed Jan. 25, 2018,which are hereby incorporated by reference herein in their entirety.

What is claimed is:
 1. A diffractive optical element comprising: a firstbase material; a first resin layer having a first surface and a secondsurface facing the first surface, the first surface having a pluralityof first steps, wherein the plurality of first steps include a pluralityof first flat wall surfaces and a plurality of first inclined surfaceseach bounded by the first flat wall surfaces, and the second surface isin contact with the first base material; a second resin layer being indirect contact with the plurality of first inclined surfaces of thefirst surface of the first resin layer, wherein a surface of the secondresin layer, on a side closer to the first resin layer, has a pluralityof second steps respectively corresponding to the plurality of firststeps of the first resin layer; and a high refractive index portionbeing in contact with the first flat wall surfaces of the first resinlayer and wall surfaces of the second resin layer, wherein the highrefractive index portion has a refractive index higher than refractiveindices of the first resin layer and of the second resin layer, whereinthe plurality of first flat wall surfaces includes a first wall surfaceportion, the plurality of first inclined surfaces includes a firstinclined surface portion disposed continuously with the first flat wallsurface portion and a second inclined surface portion disposedcontinuously with the first flat wall surface portion on an oppositeside of the first inclined surface portion, and wherein the highrefractive index portion is continuously formed in contact with a partof the first inclined surface portion, the first flat wall surfaceportion, and a part of the second inclined surface portion.
 2. Thediffractive optical element according to claim 1, wherein, in a crosssection taken along a straight line passing through a center of thediffractive optical element in a layer-stacking direction, the firstinclined surface portion is disposed continuously with the first flatwall surface portion at a grating trough of the first flat wall surfaceportion, the second inclined surface portion is disposed continuouslywith the first flat wall surface portion at a grating ridge of the firstflat wall surface portion, a first length that is a length of a part ofthe high refractive index portion in contact with the second inclinedsurface portion in a direction along the second inclined surface portionat the grating ridge of the first flat wall surface portion is 0.1 μm orless, and a second length calculated by subtracting a length of a partof the high refractive index portion not in contact with the firstinclined surface portion or the second inclined surface portion in adirection along the first inclined surface portion at the grating troughof the first flat wall surface portion from a length of a part of thehigh refractive index portion in contact with the first inclined surfaceportion in the direction along the first inclined surface portion at thegrating trough of the first flat wall surface portion is 0.2 μm or more.3. The diffractive optical element according to claim 2, wherein thesecond length is greater than the first length.
 4. The diffractiveoptical element according to claim 1, wherein in a planar view of thediffractive optical element, the first steps are each formed to have aconcentric shape.
 5. The diffractive optical element according to claim1, further comprising: a second base material being in contact with asurface opposite a surface of the second resin layer in contact with thefirst resin layer.
 6. The diffractive optical element according to claim1, wherein the high refractive index portion contains an inorganicmaterial.
 7. The diffractive optical element according to claim 6,wherein the inorganic material is one of Al₂O₃, HfO₂, ZrO₂, and La₂O₃,or a mixture of two or more thereof.
 8. The diffractive optical elementaccording to claim 1, wherein a linear expansion coefficient of the highrefractive index portion is lower than linear expansion coefficients ofthe first resin layer and the second resin layer.
 9. The diffractiveoptical element according to claim 1, wherein, in a cross section takenalong a straight line passing through a center of the diffractiveoptical element in a layer-stacking direction, wherein the plurality offirst flat wall surfaces includes a second wall surface portion, and theplurality of first inclined surfaces includes a third inclined surfaceportion, wherein the second inclined surface portion is disposedcontinuously with the second wall surface portion at a grating trough ofthe second wall surface portion, and the third inclined surface portionis disposed continuously with the second wall surface portion at agrating ridge of the second wall surface portion, and wherein when alength calculated by subtracting a length of a part of the highrefractive index portion not in contact with the second inclined surfaceportion or the third inclined surface portion in a direction along thesecond inclined surface portion at the grating trough of the second wallsurface portion from a length of a part of the high refractive indexportion in contact with the second inclined surface portion in thedirection along the second inclined surface portion at the gratingtrough of the second wall surface portion is a third length, a sum ofthe first length and the third length accounts for 5% or less of alength of the second inclined surface portion.
 10. An optical apparatus,comprising: a diffractive optical element comprising: a first basematerial; a first resin layer having a first surface and a secondsurface facing the first surface, the first surface having a pluralityof first steps, wherein the plurality of first steps include a pluralityof first flat wall surfaces and a plurality of first inclined surfaceseach bounded by the first flat wall surfaces, and the second surface isin contact with the first base material; a second resin layer being indirect contact with the plurality of first inclined surfaces of thefirst surface of the first resin layer, wherein a surface; of the secondresin layer, on a side closer to the first resin layer, has a pluralityof second steps respectively corresponding to plurality of the firststeps of the first resin layer; and a high refractive index portionbeing in contact with the first flat wall surfaces of the first resinlayer and wall surfaces of the second resin layer, wherein the highrefractive index portion has a refractive index higher than refractiveindices of the first resin layer and of the second resin layer, whereinthe plurality of first flat wall surfaces includes a first wall surfaceportion, the plurality of first inclined surfaces includes a firstinclined surface portion disposed continuously with the first flat wallsurface portion and a second inclined surface portion disposedcontinuously with the first flat wall surface portion on an oppositeside of the first inclined surface portion, and wherein the highrefractive index portion is continuously formed in contact with a partof the first inclined surface portion, the first flat wall surfaceportion, and a part of the second inclined surface portion, and whereinthe diffractive optical element is a lens.
 11. The optical apparatusaccording to claim 10, wherein the optical apparatus is a camera. 12.The optical apparatus according to claim 10, wherein the opticalapparatus is an interchangeable lens.
 13. The diffractive opticalelement according to claim 1, wherein the high refractive index portionis disposed in contact with all of the first wall surfaces.
 14. Thediffractive optical element according to claim 13, wherein, in a crosssection taken along a straight line passing through a center of thediffractive optical element in a layer-stacking direction, a totallength calculated by excluding the length of the part of the highrefractive index portion not in contact with the plurality of the firstinclined surfaces in the direction along the plurality of the inclinedsurfaces from the length of the part of the high refractive indexportion in contact with the plurality of the inclined surfaces in thedirection along the plurality of the inclined surfaces is 5% or less ofa total length of the plurality of the inclined surfaces.